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Principal Research Engineer (Lithography) (APM), IME
A*star Research Entities
14 hours ago
Posted date
14 hours ago
N/A
Minimum level
N/A
Job Description:
  • Leading central lithography team under pattern transfer group.
  • Selection, procurement and qualification of litho tool sets based on program -- from contact aligner to immersion.
  • Actively working with cross functional stake owners to plan and develop new lithography process.
  • Validate design, reticle tap out and post tap out verification.
  • Assist in internal and external technical discussion to overcome process related challenge and provide relevant solution.
  • Perform process characterization, margin study to determine the process capability of new process platform.
  • Act as a subject matter expert and resource for researchers and industry partners to enable process and/or product realization.
  • Publish process development outcome and breakthrough in research community.
  • Engage with relevant equipment makers/vendors and responsible for selecting and procuring research equipment.
  • Work with fab team in establishing SPC for newly developed process.

Requirements:
  • Ph.D/Master/Bachelor Degree in Materials Science, Electrical Engineering, Chemical Engineering, Physics, Chemistry, and Microelectronics, or closely related fields are welcome to apply.
  • More than 10 years relevant working experiences in R&D and/or industry environment with broad exposure in handling 6", 8" and/or 12" substrate covering nano to micron tech nodes, preferably experiences in SiC/GaN/Photonics.
  • Proficient in Photolithography tools including Immersion/KrF/I-line Scanner/Stepper/Mask Aligner, knowledge in EBEAM Lithography tool will be added advantage.
  • Hands-on experiences in metrology including but not limited to CDSEM, Overlay, OCD, DRSEM, Microscope. Capable to create recipe to support various research requirement.
  • Knowledge in design and simulation (Prolith, OPC, etc), reticle layout (oas, gds) review and basic tap out process.
  • Equip with Lithography skills set including fundamental Lithography theory, Photoresist characteristic and application, new process setup (swing curve, FEM, DOE, statistical root cause analysis and problem-solving methods, etc), optimization and margin improvement.
  • Relevant hardware and application knowledge in Lithography tools and metrology.
  • Possess good interpersonal and oral/written communication skills, with ability to deliver clear and concise messages to both internal and external stakeholders.
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JOB SUMMARY
Principal Research Engineer (Lithography) (APM), IME
A*star Research Entities
Singapore
14 hours ago
N/A
Contract / Freelance / Self-employed