Intern Thin Film CVD (Fab 3)
Project Title\: Process Characterization of Hydrogen in-corporation in different film type.
Project Description\: To characterize Hydrogen incorporation in different film type and understand its impact to device performance
a. Understand H2 incorporation and impact to device
b. Characterize H2 incorporation under different process condition
Project Outcome\: Better understanding of H2 incorporation to device performance. Understand what are the processing inputs that will affect H2 incorporation.