Intern Implant (Fab 7)
Implanter beam tuning success rate improvement
Implant beam tuning will affect the output of wafers. Too many failure in beam tuning will reduce the throughput of the implant.
Analysis the problematic tool/recipes/parameters and brainstorm to improve the success rate
Hit the target of 98% beam tuning success rate
Pre-requisites : Engineering of EEE, Material Science